System and Method for Measuring Distribution of Deformation using Atomic Force

淡江大學機構典藏 > 工學院 > 土木工程學系暨研究所 > 專利 > Item 987654321/110344

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题名:	System and Method for Measuring Distribution of Deformation using Atomic Force
作者:	Jang, Bong Kyun;Kim, Jae-Hyun;Lee, Hak-Joo;Kim, Kyung-Suk;Wang, Chien-Kai
日期:	2016-06-21
上传时间:	2017-06-02 02:11:14 (UTC+8)
摘要:	The present invention relates to an apparatus to measure distribution of deformation using an atomic force to measure a deformation rate of atomic scale with high resolution at low costs. The apparatus comprises: a laser light source which generates a laser beam; a first cantilever and a second cantilever close to a measurement sample or a reference sample to generate deformation due to an atomic force; an optical system which successively reflects the laser beam on the first cantilever and the second cantilever, controlling an optical path of the laser beam to arrange the first cantilever and the second cantilever in a position of a store; an observation part which observes the laser beam reflected on the second cantilever; and a stage placed on the measurement sample or the reference sample, moving to three axial directions of X, Y, and Z.COPYRIGHT KIPO 2016
显示于类别:	[土木工程學系暨研究所] 專利

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