The present invention relates to an apparatus to measure distribution of deformation using an atomic force to measure a deformation rate of atomic scale with high resolution at low costs. The apparatus comprises: a laser light source which generates a laser beam; a first cantilever and a second cantilever close to a measurement sample or a reference sample to generate deformation due to an atomic force; an optical system which successively reflects the laser beam on the first cantilever and the second cantilever, controlling an optical path of the laser beam to arrange the first cantilever and the second cantilever in a position of a store; an observation part which observes the laser beam reflected on the second cantilever; and a stage placed on the measurement sample or the reference sample, moving to three axial directions of X, Y, and Z.COPYRIGHT KIPO 2016
