Fabrication and Characterization of a Micro Methanol Sensor Using the CMOS-MEMS Technique

淡江大學機構典藏 > 工學院 > 機械與機電工程學系暨研究所 > 期刊論文 > Item 987654321/109576

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题名:	Fabrication and Characterization of a Micro Methanol Sensor Using the CMOS-MEMS Technique
作者:	Fong, Chien-Fu;Dai, Ching-Liang;Wu, Chyan-Chyi
关键词:	methanol sensor;tin dioxide;cadmium sulfide;heater
日期:	2015-10-23
上传时间:	2017-02-24 02:11:23 (UTC+8)
出版者:	M D P I AG
摘要:	A methanol microsensor integrated with a micro heater manufactured using the complementary metal oxide semiconductor (CMOS)-microelectromechanical system (MEMS) technique was presented. The sensor has a capability of detecting low concentration methanol gas. Structure of the sensor is composed of interdigitated electrodes, a sensitive film and a heater. The heater located under the interdigitated electrodes is utilized to provide a working temperature to the sensitive film. The sensitive film prepared by the sol-gel method is tin dioxide doped cadmium sulfide, which is deposited on the interdigitated electrodes. To obtain the suspended structure and deposit the sensitive film, the sensor needs a post-CMOS process to etch the sacrificial silicon dioxide layer and silicon substrate. The methanol senor is a resistive type. A readout circuit converts the resistance variation of the sensor into the output voltage. The experimental results show that the methanol sensor has a sensitivity of 0.18 V/ppm.
關聯:	Sensors 15(10), pp.27047-27059
DOI:	10.3390/s151027047
显示于类别:	[機械與機電工程學系暨研究所] 期刊論文

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