Fabrication and Characterization of a Micro Methanol Sensor Using the CMOS-MEMS Technique

機構典藏 > College of Engineering > Graduate Institute & Department of Mechanical and Electro-Mechanical Engineering > Journal Article > Item 987654321/109576

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Title:	Fabrication and Characterization of a Micro Methanol Sensor Using the CMOS-MEMS Technique
Authors:	Fong, Chien-Fu;Dai, Ching-Liang;Wu, Chyan-Chyi
Keywords:	methanol sensor;tin dioxide;cadmium sulfide;heater
Date:	2015-10-23
Issue Date:	2017-02-24 02:11:23 (UTC+8)
Publisher:	M D P I AG
Abstract:	A methanol microsensor integrated with a micro heater manufactured using the complementary metal oxide semiconductor (CMOS)-microelectromechanical system (MEMS) technique was presented. The sensor has a capability of detecting low concentration methanol gas. Structure of the sensor is composed of interdigitated electrodes, a sensitive film and a heater. The heater located under the interdigitated electrodes is utilized to provide a working temperature to the sensitive film. The sensitive film prepared by the sol-gel method is tin dioxide doped cadmium sulfide, which is deposited on the interdigitated electrodes. To obtain the suspended structure and deposit the sensitive film, the sensor needs a post-CMOS process to etch the sacrificial silicon dioxide layer and silicon substrate. The methanol senor is a resistive type. A readout circuit converts the resistance variation of the sensor into the output voltage. The experimental results show that the methanol sensor has a sensitivity of 0.18 V/ppm.
Relation:	Sensors 15(10), pp.27047-27059
DOI:	10.3390/s151027047
Appears in Collections:	[Graduate Institute & Department of Mechanical and Electro-Mechanical Engineering] Journal Article

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