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    题名: Fabrication and Characterization of a Micro Methanol Sensor Using the CMOS-MEMS Technique
    作者: Fong, Chien-Fu;Dai, Ching-Liang;Wu, Chyan-Chyi
    关键词: methanol sensor;tin dioxide;cadmium sulfide;heater
    日期: 2015-10-23
    上传时间: 2017-02-24 02:11:23 (UTC+8)
    出版者: M D P I AG
    摘要: A methanol microsensor integrated with a micro heater manufactured using the complementary metal oxide semiconductor (CMOS)-microelectromechanical system (MEMS) technique was presented. The sensor has a capability of detecting low concentration methanol gas. Structure of the sensor is composed of interdigitated electrodes, a sensitive film and a heater. The heater located under the interdigitated electrodes is utilized to provide a working temperature to the sensitive film. The sensitive film prepared by the sol-gel method is tin dioxide doped cadmium sulfide, which is deposited on the interdigitated electrodes. To obtain the suspended structure and deposit the sensitive film, the sensor needs a post-CMOS process to etch the sacrificial silicon dioxide layer and silicon substrate. The methanol senor is a resistive type. A readout circuit converts the resistance variation of the sensor into the output voltage. The experimental results show that the methanol sensor has a sensitivity of 0.18 V/ppm.
    關聯: Sensors 15(10), pp.27047-27059
    DOI: 10.3390/s151027047
    显示于类别:[機械與機電工程學系暨研究所] 期刊論文

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