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    题名: Efficient Method for Testing the Batch-Processing Process Yield
    作者: Liao, Mou-Yuan;Wu, Chien-Wei
    关键词: Generalized confidence interval;multiple batches;process yield
    日期: 2016
    上传时间: 2017-01-17 10:57:00 (UTC+8)
    出版者: 淡江大學出版中心
    摘要: Batch manufacturing processes have been widely used in various manufacturing processes, such as wafer fabrication, IC fabrication, and gridline printing process in the solar battery fabrication. In a batch manufacturing process, products are produced batch-by-batch. Thus, total process variations are generally divided into batch-by-batch variation and within-batch variation. The main purpose of this study is to provide an efficient method for testing the batch-processing process yield. Base on the one-way random effect model, the generalized pivotal quantity is utilized to establish the generalized confidence interval for assessing the process yield index. By simulations, the proposed method shows that its empirical coverage probability is not affected by the batch effect, and is still close the nominal coverage probability as the batch size increases.
    關聯: International Journal of Information and Management Sciences 27(1), pp.1-16
    DOI: 10.6186/IJIMS.2016.27.1.1
    显示于类别:[資訊與管理科學期刊] 第27卷第1期


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