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    题名: Iron, nitrogen and silicon doped diamond like carbon (DLC) thin films: A comparative study
    作者: Ray, S.C.;Pong, W.F.;Papakonstantinou, P.
    关键词: Diamond like carbon (DLC);Fe-doped DLC;N-doped DLC;Si-doped DLC
    日期: 2016-07
    上传时间: 2017-01-17 02:10:27 (UTC+8)
    摘要: The X-ray absorption near edge structure (XANES), X-ray photoelectron spectroscopy (XPS), valence band photoemission (VB-PES) and Raman spectroscopy results show that the incorporation of nitrogen in pulsed laser deposited diamond like carbon (DLC) thin films, reverts the sp3 network to sp2 as evidenced by an increase of the sp2 cluster and ID/IG ratio in C K-edge XANES and Raman spectra respectively which reduces the hardness/Young's modulus into the film network. Si-doped DLC film deposited in a plasma enhanced chemical vapour deposition process reduces the sp2 cluster and ID/IG ratio that causes the decrease of hardness/Young's modulus of the film structure. The Fe-doped DLC films deposited by dip coating technique increase the hardness/Young's modulus with an increase of sp3-content in DLC film structure.
    關聯: Thin Solid Films 610, pp.42-47
    DOI: 10.1016/j.tsf.2016.04.048
    显示于类别:[物理學系暨研究所] 期刊論文


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