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    Title: 介電非圓形微盤的光子奈米噴流現象研究
    Other Titles: The study of photonic nanojets of the dielectric non-spherical microdisks
    Authors: 林凡智;Lin, Fan-Chih
    Contributors: 淡江大學機械與機電工程學系碩士班
    劉承揚;Liu, Cheng-Yang
    Keywords: 光子奈米噴流;非圓形微盤;晶圓製程;繞射極限;photonic nanojets;non-spherical microdisk;wafer;diffraction limit
    Date: 2015
    Issue Date: 2016-01-22 15:04:32 (UTC+8)
    Abstract: 根據先前文獻可知,微盤的形狀對於光子奈米噴流的產生有相當大的影響,因此本論文研究兩種介電材料(二氧化矽與聚二甲基矽氧烷)的非圓形微盤在三種(紅、綠、藍)雷射光源照射下產生的光子奈米噴流現象。本論文將不同直徑的圓盤截斷成相同寬度的非圓形微盤來進行理論計算與實驗量測。在理論計算方面,本論文使用時域有限差分法來模擬各種寬度非圓形微盤的光子奈米噴流光場分佈與光強度變化。在非圓形微盤製程方面,本論文使用半導體製程和翻模技術,做出兩種介電材料的非圓形微盤。在實驗量測方面,本論文使用高靈敏度光學顯微系統,來觀察非圓形微盤光子奈米噴流的實際影像,並撰寫電腦程式來計算光子奈米噴流的各種參數,其中包含噴流焦距、半高全寬、衰減長度。經由數值計算和實驗結果相互驗證,本論文發現改變非圓形微盤的寬度就能夠控制光子奈米噴流的聚焦效果、增加焦距、提高衰減長度或增加聚焦強度,這些特性有助於發展下世代的奈米級光學顯微物鏡。
    According to previous literatures, the shape of the microdisk has a considerable effect on the generation of photonic nanojets. In this research, photonic nanojets produced by non-spherical microdisks in two dielectric materials (silica and polydimethylsiloxane) at three laser sources (red, green and blue lasers) are studied. The spherical microdisks of different diameters are truncated in the same width of non-spherical microdisks for theoretical calculation and experimental measurements. In theoretical calculations, we use finite-difference time-domain method to simulate photonic nanojet distributions in various widths of non-spherical microdisks. In the manufacturing process, we use semiconductor process and replica molding technology to fabricate non-spherical microdisks in two dielectric materials. In the experimental measurements, we use a high sensitivity optical microscope to observe the real images of photonic nanojets. The key parameters of photonic nanojets are calculated by computer program which include jet focal, full width at half maximum and decay length. The enhancement of focusing effect, focal length and decay length can be controlled by changing the width of the non-spherical microdisks. These nanojet properties can help the future development of the nanoscale optical microscope objectives.
    Appears in Collections:[機械與機電工程學系暨研究所] 學位論文

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