本論文研究結合數位結構光投影、多步相位移、相位展開與參考平面扣除法等技術來量測滾珠螺桿之三維曲面，其中結構光為黑白餘弦條紋，相位移技術採用三、四、五及七步相位移法，相位展開技術採用路徑獨立型相位展開技術，並改良參考平面扣除法，成功減少參考平面扣除時產生的相位誤差。在實驗系統方面，本論文使用DLP投影機作為結構光光源，CCD攝影機為接收裝置，並透過電控轉盤來控制攝影機的角度，精確的進行不同角度之量測，以觀察在不同量測角度和多步相位移干涉下對螺桿三維曲面量測的影響。實驗結果證明，七步相位移干涉的量測結果最佳，其相位誤差最小，而量測角度以20°為最佳，當量測角度越大時，則相位損失越嚴重。本論文建立出一套完整的多步相位移干涉量測系統，系統架構簡單，操作容易，量測精度可達0.05 mm，未來可應用於生產線上之即時三維曲面量測。 The Three-dimensional surface measurements of ballscrew are presented in this thesis, including digital structured light projection, multi-step phase-shifting, phase unwrapping and reference plane subtraction method. The light source used in the system is structured light with black and white cosine fringe pattern. The three-step, four-step, five-step and seven-step phase shifting techniques are used to calculate wrapped phase maps. The phase unwrapping technique is used to obtain the absolute unwrapping phase maps. The phase errors are reduced by using reference plane subtraction. In the experimental system, a DLP projector is used as light source to project structured light onto ballscrew surface. The fringe pattern images are captured by the CCD camera. The detecting angle of the camera is controlled by using motorized stage. The influence of the detecting angles and multi-step phase-shifting technique are observed and analyzed. The experimental results prove that the seven-step phase-shifting technique has best imaging with lowest phase error. The best detecting angle is twenty degree. The phase errors increase as detecting angle increase. The multi-step phase-shifting interferometry measurement system is simple and easy to operate and can be used for real time three-dimensional surface measurement.