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    Title: X光吸收光譜對銅離子植入超奈米鑽石薄膜之研究
    Other Titles: X-ray absorption spectroscopy study of Cu ion implanted ultra-nano crystalline diamond films
    Authors: 葉可揚;Ye, Ke-Yang
    Contributors: 淡江大學物理學系碩士班
    張經霖;Chang, Ching-Lin
    Keywords: X光吸收光譜;鑽石薄膜;Daimond thin film;UNCD;ion implanted
    Date: 2015
    Issue Date: 2016-01-22 14:51:13 (UTC+8)
    Abstract: 我們以X光吸收光譜探討銅離子植入超奈米鑽石薄膜 (UNCD)電子結構的改變,樣品分別以相同能量(300KeV)不同劑量的銅離子束照射之UNCD,劑量為1x1015到 1x1017 (ions/cm2)。在C K-edge 光譜中我們觀察到,照射後的譜形與未照射(Pristine)的譜形完全不同,鑽石的特徵激子峰以及二次能隙在照射後消失鑽石結構遭到破壞,而在285 eV、286 eV 、287 eV及288 eV 的位置上,分別為π* bond、C-OH bond、C-H bond 及表面缺陷所造成的吸收強度有明顯的增強。π* bond的位置發現吸收強度隨著劑量不同有強度上的變化,在劑量超過1x1016 (ions/cm2)時,吸收強度突然下降且吸收峰往低能量(284 eV)位移;C-OH bond吸收強度有隨著劑量增加而減少的情形,但在劑量超過1x1016 (ions/cm2)時,吸收強度大幅度的上升;C-H bond 隨著劑量的增加而增加,但在劑量到達5x1016時突然下降;表面缺陷吸收強度隨著劑量的增加,有先增加後減少的情形,而在最大劑量時為最低在。在Cu K-edge 光譜中我們發現主吸收峰和肩膀峰吸收強度隨著劑量的增加而減少,且譜形往高能量位移,銅的電子組態[Ar]3d94sp增加,[Ar]3d10減少。在Cu L2,3-edge光譜中我們觀察到隨著劑量上升時,譜形無明顯變化,但在最大劑量1x1017 (ions/cm2)時,我們觀察到L2,3-edge的主吸收峰有寬化情形,3d-4s-4p 混成程度上升。
    We have performed x-ray absorption near edge structure (XANES) study on Cu ion implanted, fluence varies from 1x1015 to 1x1017 ions/cm2, ultra-nano crystalline diamond (UNCD) films. From the XANES of C K-edge of the films, we found that the absorption intensity of sp3 structure decreased tremendously. In the meantime, the exciton peak and the second band gap are completely disappeared. We also observed the absorption intensities due to sp2 structure, C-OH bond, C-H bond and the surface defect peaks all increase. As the Cu-ion fluence reached 1x1016 ions/cm2, the absorption intensity of sp2 peak decreases, the intensities of C-H bond and the surface defect peaks increase. When the Cu-ion fluence reached 5x1016 ions/cm2, the sp2 peak shifts to lower energy, which may be related to the formation of amorphous carbon. Also the intensity of C-OH peak increases, and the intensities of C-H and the surface defect peaks decrease at fluence of 5x1016 ions/cm2. From the spectra of Cu K-edge, the intensity of the main peak, due to Cu 1s to 4p transition, decreases as the Cu-ion fluence increases. From Cu L2,3-edge we found an obvious broadening of the main absorption peaks at the highest fluence. When the fluence increases, sp3 structure decreases and sp2 structure increases. While the fluence exceeds 5x1016 ions/cm2, sp2 structure decreases and the amorphous carbon forms. At the highest fluence, Cu 3d-4s-4p hybridization increases.
    Appears in Collections:[物理學系暨研究所] 學位論文

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