Studies on Surface Tension Influenced Critical Gap in Cantilever Microstructures

淡江大學機構典藏 > 工學院 > 機械與機電工程學系暨研究所 > 期刊論文 > Item 987654321/103392

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題名:	Studies on Surface Tension Influenced Critical Gap in Cantilever Microstructures
作者:	楊龍杰;Marimuthu, Suseendar
貢獻者:	淡江大學機械與機電工程學系
關鍵詞:	Stiction;Surface tension;Cantilever;Critical gap
日期:	2015-07-15
上傳時間:	2015-07-13 13:03:54 (UTC+8)
出版者:	Cambrige
摘要:	This note presents an elasto-capillary model of a cantilever subject to capillary stiction during drying process of removing sacrificial layers in MEMS. Similar to the dynamic analysis of the electrostatic pull-in of electrostatic micro actuators, the cantilever beam tends to be pulled down to the substrate due to the nonlinear capillary force with respect to the gap. The critical one-half gap deformation and the corresponding critical wetting area for pulling down a micro cantilever by surface tension are analytically found herein. The instability situation of a generalized critical deformation for power-law surface force with respect to gap is also predicted accordingly. Some prior MEMS works are exemplified to justify this critical one-half gap deformation for capillary stiction.
關聯:	Journal of Mechanics, 32(1), pp.19-24
DOI:	10.1017/jmech.2015.50
顯示於類別:	[機械與機電工程學系暨研究所] 期刊論文

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