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    题名: Studies on Surface Tension Influenced Critical Gap in Cantilever Microstructures
    作者: 楊龍杰;Marimuthu, Suseendar
    贡献者: 淡江大學機械與機電工程學系
    关键词: Stiction;Surface tension;Cantilever;Critical gap
    日期: 2015-07-15
    上传时间: 2015-07-13 13:03:54 (UTC+8)
    出版者: Cambrige
    摘要: This note presents an elasto-capillary model of a cantilever subject to capillary stiction during drying process of removing sacrificial layers in MEMS. Similar to the dynamic analysis of the electrostatic pull-in of electrostatic micro actuators, the cantilever beam tends to be pulled down to the substrate due to the nonlinear capillary force with respect to the gap. The critical one-half gap deformation and the corresponding critical wetting area for pulling down a micro cantilever by surface tension are analytically found herein. The instability situation of a generalized critical deformation for power-law surface force with respect to gap is also predicted accordingly. Some prior MEMS works are exemplified to justify this critical one-half gap deformation for capillary stiction.
    關聯: Journal of Mechanics, 32(1), pp.19-24
    DOI: 10.1017/jmech.2015.50
    显示于类别:[機械與機電工程學系暨研究所] 期刊論文


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