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    Please use this identifier to cite or link to this item: http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/103392

    Title: Studies on Surface Tension Influenced Critical Gap in Cantilever Microstructures
    Authors: 楊龍杰;Marimuthu, Suseendar
    Contributors: 淡江大學機械與機電工程學系
    Keywords: Stiction;Surface tension;Cantilever;Critical gap
    Date: 2015-07-15
    Issue Date: 2015-07-13 13:03:54 (UTC+8)
    Publisher: Cambrige
    Abstract: This note presents an elasto-capillary model of a cantilever subject to capillary stiction during drying process of removing sacrificial layers in MEMS. Similar to the dynamic analysis of the electrostatic pull-in of electrostatic micro actuators, the cantilever beam tends to be pulled down to the substrate due to the nonlinear capillary force with respect to the gap. The critical one-half gap deformation and the corresponding critical wetting area for pulling down a micro cantilever by surface tension are analytically found herein. The instability situation of a generalized critical deformation for power-law surface force with respect to gap is also predicted accordingly. Some prior MEMS works are exemplified to justify this critical one-half gap deformation for capillary stiction.
    Relation: Journal of Mechanics, 32(1), pp.19-24
    DOI: 10.1017/jmech.2015.50
    Appears in Collections:[Graduate Institute & Department of Mechanical and Electro-Mechanical Engineering] Journal Article

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