English  |  正體中文  |  简体中文  |  Items with full text/Total items : 51772/86996 (60%)
Visitors : 8371884      Online Users : 67
RC Version 7.0 © Powered By DSPACE, MIT. Enhanced by NTU Library & TKU Library IR team.
Scope Tips:
  • please add "double quotation mark" for query phrases to get precise results
  • please goto advance search for comprehansive author search
  • Adv. Search
    HomeLoginUploadHelpAboutAdminister Goto mobile version
    Please use this identifier to cite or link to this item: http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/103392


    Title: Studies on Surface Tension Influenced Critical Gap in Cantilever Microstructures
    Authors: 楊龍杰;Marimuthu, Suseendar
    Contributors: 淡江大學機械與機電工程學系
    Keywords: Stiction;Surface tension;Cantilever;Critical gap
    Date: 2016/01/01
    Issue Date: 2015-07-13 13:03:54 (UTC+8)
    Publisher: Cambrige
    Abstract: This note presents an elasto-capillary model of a cantilever subject to capillary stiction during drying process of removing sacrificial layers in MEMS. Similar to the dynamic analysis of the electrostatic pull-in of electrostatic micro actuators, the cantilever beam tends to be pulled down to the substrate due to the nonlinear capillary force with respect to the gap. The critical one-half gap deformation and the corresponding critical wetting area for pulling down a micro cantilever by surface tension are analytically found herein. The instability situation of a generalized critical deformation for power-law surface force with respect to gap is also predicted accordingly. Some prior MEMS works are exemplified to justify this critical one-half gap deformation for capillary stiction.
    Relation: Journal of Mechanics, 32(1), pp.19-24
    DOI: 10.1017/jmech.2015.50
    Appears in Collections:[機械與機電工程學系暨研究所] 期刊論文

    Files in This Item:

    File Description SizeFormat
    50_JOM_p000-000-103-1112A (final).pdf326KbAdobe PDF310View/Open

    All items in 機構典藏 are protected by copyright, with all rights reserved.


    DSpace Software Copyright © 2002-2004  MIT &  Hewlett-Packard  /   Enhanced by   NTU Library & TKU Library IR teams. Copyright ©   - Feedback