我們過去開發奈米晶鑽石的孕核成長製程技術，除了發展成功可以在矽基 板上鍍緻密的奈米晶鑽石薄膜，並瞭解成長奈米晶鑽石薄膜的機制之外，我們並 發展成功以CH4/N2 電漿，製備具「高導電的鑽石薄膜」。初步分析，知這種「高 導電的鑽石薄膜」實際上是含有核一殼結構，它是一種針狀(5 奈米X10 奈米)的 鑽石晶粒，在其上包覆著約2-10 奈米的石墨層。 這種「高導電的鑽石薄膜」，具有潛力可以用來開發「電子場發射元件」及 「電化學感測電極」，因此未來將一方面探討在CH4/N2 電漿中，長成針狀鑽石晶 粒的機制，另一方面配合矽尖端(Si-tip)製程，在矽尖端上鍍高導電鑽石薄膜，以 增加電子發射元的場增強因子，希望能發展出性能更加優異的「電子場發射元 件」。此外，利用鑽石材料抗腐性及高導電的優點，製作電化學電極，可以檢測 血液中含有之病毒(或化學廢液中之有毒物種)，改進原來白金、石墨材料化學電 極的靈敏度及鑑別率。 此外，配合本整合性計畫，開發RIE 電漿蝕刻製程直接將「高導電鑽石薄 膜」蝕刻成鑽石奈米線(diamand nanowires)，開發高導電鑽石奈米線陣列，更 進一步提升「電子場發射元件」及「電化學感測電極」之效能。 In the past few years, we have developed the nucleation and growth technique for synthesizing a high density ultranano crystallizes diamond UNCD films on Si-substrates. We have investigated and solved the puzzle of “how the ultra-small grains in UNCD films were formed.” Moreover, we have synthesize a “highly conductive UNCD films” using CH4/N2 plasma. We investigated the TEM microstructure of these “highly conductive UNCD films” and found of that these films are actually consisted of needle-like diamond grains with core-shell granular structure. The core is sp3-bonded diamond and the shell is sp2-bonded graphitic phase. The highly conductive UNCD films possess a great potential for the applications as “electron field emitters” and ”electro chemical sensing electrodes.” Therefore, in the future, we shall continue the research in understanding the mechanism for the formation of needle-like diamond grains and. In the meantime, develop a process for fabricating the Si-tips and use them as templates for growing the highly conductive UNCD films, so as to enhance the field concentration factor of the field emitter. We shall, by combining the two process, further improve the electron field emission behavior of the emitters. Furthermore, the diamond materials are very stables against the corrosive environment. The electrodes made of highly conductive UNCD films can be used for sensing the virus in the blood as well as the toxy compounds in the chemical disposal. The wide redox window of the diamond materials renders the highly conductive electrochemical electrode much more advantageous over the conventional platinum as graphite electrodes in sensitivity and selectivity. Moreover, we shall develop the RIE plasma etching process, to directly etching highly conductive UNCD films into diamond nanowires. And explore the feasibility of using conductive diamond nanowires as “any” for applications in electron field emitters and “electrochemical sensing electrode” to improve their performance.