隨著光電業和半導體業的快速發展，對於各種精密零件或光學元件的需求量很大，其光學元件從平面、球面、非球面進展至各種自由形式的幾何形狀。而對於次釐米光學元件的需求日益增加，近年來已開發許多新技術，改善現有的方法來有效並經濟的生產光學元件。玻璃模造技術(GMP)是大量生產精密玻璃光學元件的其中之一種方法，其關鍵在於精密模具製造，由於模具通常是硬而脆的材料，如碳化鎢(WC)和碳化矽(SiC)，主要使用精密鑽石砂輪研磨來完成這些模具。而光學元件的尺寸變小，製造模具的砂輪工具尺寸也勢必要縮小，這使得研磨過程變得成本提高與非常耗時。本研究開發小型光固化樹脂鑽石砂輪及利用其砂輪進行精密研磨、拋光，達到有效生產小型模具之目的，以改善小型模具之製造過程。於研究中，修整過後之小型砂輪直徑約0.5mm，利用其砂輪於加工方面，研磨非球面模具表粗Ra可達63 nm；單點拋光模具表粗Ra可達10 nm。 Owing to the fast development in opto-electronic, semiconductor, components of high precision and customized shapes are in great demand. The optical components have evolved from planar, spherical, aspheric to free-form geometries. As the demand for precision optical components with sub-millimetre feature size steadily increasing, numerous efforts have been made in developing new techniques and in improving the existing approaches to efficiently and economically produce those components. Glass moulding process (GMP) is one of these methods to enable mass production of precision glass optical components in recent years. One of the key issues in GMP is precision mould fabrication. Since the mould are normally made of hard and brittle materials such as tungsten carbide (WC) and silicon carbide (SiC), precision diamond grinding is by far the principal choice used to machine the GMP mould. As the feature size of optical component gets smaller, the size of mould and grinding wheel used to fabricate the mould gets smaller too. This makes the grinding process a very time consuming and expensive task. This research aimed to improve the small mould fabrication processes by developing an effective way of producing small diamond wheels and precision grinding/polishing processes. Diamond wheels of around 0.5mm in diameter after truing and WC aspheric moulds of surface roughness around 63 nm and 10 nm (Ra) after grinding and polishing respectively were successfully produced in this research.