淡江大學機構典藏:Item 987654321/102613
English  |  正體中文  |  简体中文  |  全文笔数/总笔数 : 62830/95882 (66%)
造访人次 : 4048174      在线人数 : 584
RC Version 7.0 © Powered By DSPACE, MIT. Enhanced by NTU Library & TKU Library IR team.
搜寻范围 查询小技巧:
  • 您可在西文检索词汇前后加上"双引号",以获取较精准的检索结果
  • 若欲以作者姓名搜寻,建议至进阶搜寻限定作者字段,可获得较完整数据
  • 进阶搜寻


    jsp.display-item.identifier=請使用永久網址來引用或連結此文件: https://tkuir.lib.tku.edu.tw/dspace/handle/987654321/102613


    题名: 整合異質材料與製程之微轉子引擎研製
    其它题名: Integration of heterogeneous materials and processes for a micro-rotor engine
    作者: 何柏緯;Ho, Po-Wei
    贡献者: 淡江大學機械與機電工程學系碩士班
    楊龍杰
    关键词: 微機電製程;熱阻計算;異質材料微轉子引擎;模擬分析;MEMS process;Heterogeneous Materials Micro-rotor Engine;Thermal resistance calculation;Simulation Analysis
    日期: 2014
    上传时间: 2015-05-04 10:00:07 (UTC+8)
    摘要: 本文參考史特靈引擎的溫差驅動原理,應用於汪克爾引擎並將之微小化,主要目的在於改良,研製新型的微轉子引擎,分別微縮尺寸到10 mm × 5.3 mm 、5 mm × 2.65 mm 二種。首先經由ANSYS模擬分析,觀察前二代的熱傳導方式,之後改變前兩代的材料參數,觀察熱傳方式是否改變,並深入探討及比較,獲得新一代微轉子引擎的設計方向。為選用適合之材料搭配之異質材料微轉子引擎。後續利用微機電技術製作異質材料微轉子引擎,以ICP製作矽晶圓腔體和翻模母模,搭配聚二甲基矽氧烷PDMS翻膜製程,成功製作出腔體結構,玻璃轉子結構則以雷射切割技術製作。最後利用氧氣電漿做表面改質,將PDMS及矽晶圓腔體作接合,並鍍上parylene防止洩漏。於測試方面,先利用超音波震洗機確定轉子於製程中無沾黏於PDMS或Pyrex 7740表面,之後自行組裝加熱端及冷卻端,測試異質材料微轉子引擎是否可利用溫差改變流體體積而驅動轉子轉動。
    This study presents a novel concept of design and fabrications of an ultra-small engine, the configuration refers to Wankel engine. The engine operates with the temperature difference which refers to the concept of Stirling engine. There are three size have been 10 mm × 5.3 mm, and 5 mm × 2.65 mm. First through the ANSYS simulation analysis, thermal conduction was observed before the second generation. After changing the material parameters of the previous two generations, the author observes whether to change the heat transfer way, and access to micro-rotor design direction for the new generation of engines. That is the integration of heterogeneous materials and processes for this micro-rotor engine. The subsequent MEMS technology are to produce silicon wafer mold cavity by ICP and turn the master model, to poly dimethyl siloxane (PDMS). The production of glass rotor is done by laser cutting. Finally, with using oxygen plasma treatment, the author bond the PDMS and the silicon wafer cavity. To prevent leakage the engine was coated with parylene outside. On the testing stage, the author applied ultrasonic cleaning machine to shake the rotor without sticking to the surface of PDMS or Pyrex 7740. After the home-made test facility of heating and cooling-side, the micro-rotor engine with heterogeneous materials can be tested to verify whether the temperature difference between the device can drive the rotor.
    显示于类别:[機械與機電工程學系暨研究所] 學位論文

    文件中的档案:

    档案 大小格式浏览次数
    index.html0KbHTML241检视/开启

    在機構典藏中所有的数据项都受到原著作权保护.

    TAIR相关文章

    DSpace Software Copyright © 2002-2004  MIT &  Hewlett-Packard  /   Enhanced by   NTU Library & TKU Library IR teams. Copyright ©   - 回馈