本文參考史特靈引擎的溫差驅動原理，應用於汪克爾引擎並將之微小化，主要目的在於改良，研製新型的微轉子引擎，分別微縮尺寸到10 mm × 5.3 mm 、5 mm × 2.65 mm 二種。首先經由ANSYS模擬分析，觀察前二代的熱傳導方式，之後改變前兩代的材料參數，觀察熱傳方式是否改變，並深入探討及比較，獲得新一代微轉子引擎的設計方向。為選用適合之材料搭配之異質材料微轉子引擎。後續利用微機電技術製作異質材料微轉子引擎，以ICP製作矽晶圓腔體和翻模母模，搭配聚二甲基矽氧烷PDMS翻膜製程，成功製作出腔體結構，玻璃轉子結構則以雷射切割技術製作。最後利用氧氣電漿做表面改質，將PDMS及矽晶圓腔體作接合，並鍍上parylene防止洩漏。於測試方面，先利用超音波震洗機確定轉子於製程中無沾黏於PDMS或Pyrex 7740表面，之後自行組裝加熱端及冷卻端，測試異質材料微轉子引擎是否可利用溫差改變流體體積而驅動轉子轉動。 This study presents a novel concept of design and fabrications of an ultra-small engine, the configuration refers to Wankel engine. The engine operates with the temperature difference which refers to the concept of Stirling engine. There are three size have been 10 mm × 5.3 mm, and 5 mm × 2.65 mm. First through the ANSYS simulation analysis, thermal conduction was observed before the second generation. After changing the material parameters of the previous two generations, the author observes whether to change the heat transfer way, and access to micro-rotor design direction for the new generation of engines. That is the integration of heterogeneous materials and processes for this micro-rotor engine. The subsequent MEMS technology are to produce silicon wafer mold cavity by ICP and turn the master model, to poly dimethyl siloxane (PDMS). The production of glass rotor is done by laser cutting. Finally, with using oxygen plasma treatment, the author bond the PDMS and the silicon wafer cavity. To prevent leakage the engine was coated with parylene outside. On the testing stage, the author applied ultrasonic cleaning machine to shake the rotor without sticking to the surface of PDMS or Pyrex 7740. After the home-made test facility of heating and cooling-side, the micro-rotor engine with heterogeneous materials can be tested to verify whether the temperature difference between the device can drive the rotor.
