淡江大學機構典藏:Item 987654321/100525
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    Please use this identifier to cite or link to this item: https://tkuir.lib.tku.edu.tw/dspace/handle/987654321/100525


    Title: 微結構基板製造方法
    Other Titles: METHOD FOR MICROSTRUCTURE SUBSTRATE MANUFACTURING
    Authors: 趙崇禮;馬廣仁;周文成
    Contributors: 淡江大學機械與機電工程學系
    Date: 2014-11
    Issue Date: 2015-03-03 02:28:32 (UTC+8)
    Abstract: 本發明提供一種微結構基板製造方法。此方法包含步驟有：提供模具，此模具具有洩液閥，而模具的上表面具有微結構；將溶膠液體注入模具，使溶膠液體淹沒微結構；提供基板，將基板浸入溶膠液體中；使基板由上而下定位於模具內；藉由模具之洩液閥移除基板上方溶膠液體，並使基板與模具的微結構之間保留有預定容積的溶膠液體；固化溶膠液體，使其緊固於基板與模具相鄰的表面，並形成結構層；以及沿垂直方向使模具與固化後之結構層分離，此製造方法可確保基板製造時不易受損，同時降低製作成本且提高產能。
    Appears in Collections:[Graduate Institute & Department of Mechanical and Electro-Mechanical Engineering] Patent

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