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    Please use this identifier to cite or link to this item: http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/100525

    Title: 微結構基板製造方法
    Authors: 趙崇禮;馬廣仁;周文成
    Contributors: 淡江大學機械與機電工程學系
    Date: 2014-11
    Issue Date: 2015-03-03 02:28:32 (UTC+8)
    Abstract: 本發明提供一種微結構基板製造方法。此方法包含步驟有:提供模具,此模具具有洩液閥,而模具的上表面具有微結構;將溶膠液體注入模具,使溶膠液體淹沒微結構;提供基板,將基板浸入溶膠液體中;使基板由上而下定位於模具內;藉由模具之洩液閥移除基板上方溶膠液體,並使基板與模具的微結構之間保留有預定容積的溶膠液體;固化溶膠液體,使其緊固於基板與模具相鄰的表面,並形成結構層;以及沿垂直方向使模具與固化後之結構層分離,此製造方法可確保基板製造時不易受損,同時降低製作成本且提高產能。
    Appears in Collections:[機械與機電工程學系暨研究所] 專利

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