淡江大學機構典藏:Item 987654321/100524
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    Please use this identifier to cite or link to this item: https://tkuir.lib.tku.edu.tw/dspace/handle/987654321/100524


    Title: 繞射光學元件、繞射光學元件陣列，及其製作方法
    Other Titles: DIFFRACTIVE OPTICAL ELEMENTS, DIFFRACTIVE OPTICAL ELEMENTS ARRAY AND MANUFACTURING METHOD THEREOF
    Authors: 趙崇禮;馬廣仁;周文成
    Contributors: 淡江大學機械與機電工程學系
    Date: 2014-03
    Issue Date: 2015-03-03 02:27:04 (UTC+8)
    Abstract: 本發明提供一種繞射光學元件及繞射光學元件陣列的製作方法，以及經由上述方法所製作之繞射光學元件及元件陣列。繞射光學元件的製作方法，包括提供基材，基材具有第一硬度與第一厚度，並於基材上形成光阻層，光阻層具有均勻的第一高度，接著提供表面形成有繞射光學元件公圖案的模具，在公圖案的外部周圍形成有複數個支腳，之後以模具對光阻層進行壓印，藉此在光阻層的表面形成對應於該公圖案的母圖案，接著硬化光阻層然後移除模具，再蝕刻光阻層與基材，藉此形成繞射光學元件的公圖案於基材的上表面。
    Appears in Collections:[Graduate Institute & Department of Mechanical and Electro-Mechanical Engineering] Patent

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