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    Please use this identifier to cite or link to this item: http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/100522


    Title: 微結構基板及其成型方法
    Other Titles: SUBSTRATE WITH MICROSTRUCTURES AND THE MANUFACTURING METHOD THEREOF
    Authors: 趙崇禮;馬廣仁;周文成
    Contributors: 淡江大學機械與機電工程學系
    Date: 2014-01
    Issue Date: 2015-03-03 02:23:43 (UTC+8)
    Abstract: 本發明提供一種具有微結構基板及其成型方法。微結構基板成型方法包含提供基材,基材的熔點為第一溫度;提供至少一靶材,對基材之表面以濺鍍(Sputter)形成金屬薄層,金屬薄層的熔點為第二溫度,第二溫度小於第一溫度;持續對金屬薄層加熱,使金屬薄層的溫度上升至第三溫度,第三溫度小於第二溫度,且第三溫度與第二溫度之間具有溫度差,藉此使金屬薄層形成複數個半球狀微結構,各半球狀微結構之間具有間隙,且金屬薄層的厚度不大於該半球狀微結構的直徑。
    Appears in Collections:[機械與機電工程學系暨研究所] 專利

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