English  |  正體中文  |  简体中文  |  Items with full text/Total items : 60916/93528 (65%)
Visitors : 1558761      Online Users : 18
RC Version 7.0 © Powered By DSPACE, MIT. Enhanced by NTU Library & TKU Library IR team.
Scope Tips:
  • please add "double quotation mark" for query phrases to get precise results
  • please goto advance search for comprehansive author search
  • Adv. Search
    HomeLoginUploadHelpAboutAdminister Goto mobile version
    Please use this identifier to cite or link to this item: https://tkuir.lib.tku.edu.tw/dspace/handle/987654321/100160

    Title: Change of diamond film structure and morphology with N2 addition in MW PECVD apparatus with linear antenna delivery system
    Authors: Marie Jakl Kre_cmarová;Václav Petrák;Andrew Taylor;Kamatchi Jothiramalingam Sankaran;Lin, I-Nan;Aleš Jäger;Viera Gärtnerová;Ladislav Fekete;Jan Drahokoupil;František Laufek;Ji_rí Vacík;Pavel Hubík;Vincent Mortet;Miloš Nesládek
    Contributors: 淡江大學物理學系
    Keywords: linear antenna;nano-diamond;nitrogen doping;TEM;Raman spectroscopy
    Date: 2014-10
    Issue Date: 2015-02-03 16:44:28 (UTC+8)
    Publisher: Weinheim: Wiley - V C H Verlag GmbH & Co. KGaA
    Abstract: Deposition of nano-crystalline diamond (NCD) over large areas is of high interest for industrial applications. For instance NCD is an excellent substrate for cell growth but it is also interesting for photonic applications associated with nitrogen-vacancy (NV) centres. There have been many studies on the effect of nitrogen addition on the growth of diamond using conventional resonance cavity microwave plasmas (both H and Ar based) but none using MW PECVD apparatus with linear antenna delivery system (MW-LA-PECVD). In this work, we show that an ultra nano-crystalline diamond (UNCD) type of morphology can be prepared upon N2 addition to H2[BOND]CO2[BOND]CH4 plasmas at low pressures (0.3 mbar) and low temperature (520 °C); however, these films despite their UNCD character show sp3 dominated Raman spectra and highly isolating behavior. The crystalline structure and morphology of the films were characterized by scanning electron microscopy, atomic force microscopy, Raman spectroscopy, grazing angle X-ray diffraction, and transmission electron microscopy. Diamond films' composition was evaluated from thermal neutron depth profiling. Films were also characterized by photoluminescence spectroscopy to study the incorporation of luminescent NV centre. Addition of nitrogen increases deposition rate and dramatically changes surface morphology and crystalline structure from well faceted diamond crystals to UNCD like morphology.
    Relation: physica status solidi (a) 211(10), pp.2296–2301
    DOI: 10.1002/pssa.201431255
    Appears in Collections:[Graduate Institute & Department of Physics] Journal Article

    Files in This Item:

    File Description SizeFormat

    All items in 機構典藏 are protected by copyright, with all rights reserved.

    DSpace Software Copyright © 2002-2004  MIT &  Hewlett-Packard  /   Enhanced by   NTU Library & TKU Library IR teams. Copyright ©   - Feedback