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    題名: Modeling and Manufacturing of a Micromachined Magnetic Sensor Using the CMOS Process without Any Post-Process
    作者: Tseng, Jian-Zhi;Wu, Chyan-Chyi;Dai, Ching-Liang
    貢獻者: 淡江大學機械與機電工程學系
    關鍵詞: magnetic sensor;magneto-transistor;CMOS
    日期: 2014-04-11
    上傳時間: 2015-01-28 11:07:45 (UTC+8)
    出版者: Switzerland: M D P I AG
    摘要: The modeling and fabrication of a magnetic microsensor based on a magneto-transistor were presented. The magnetic sensor is fabricated by the commercial 0.18 μm complementary metal oxide semiconductor (CMOS) process without any post-process. The finite element method (FEM) software Sentaurus TCAD is utilized to analyze the electrical properties and carriers motion path of the magneto-transistor. A readout circuit is used to amplify the voltage difference of the bases into the output voltage. Experiments show that the sensitivity of the magnetic sensor is 354 mV/T at the supply current of 4 mA.
    關聯: Sensors 14(4), pp.6722-6733
    DOI: 10.3390/s140406722
    顯示於類別:[機械與機電工程學系暨研究所] 期刊論文

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