English  |  正體中文  |  简体中文  |  Items with full text/Total items : 49521/84657 (58%)
Visitors : 7596139      Online Users : 58
RC Version 7.0 © Powered By DSPACE, MIT. Enhanced by NTU Library & TKU Library IR team.
Scope Tips:
  • please add "double quotation mark" for query phrases to get precise results
  • please goto advance search for comprehansive author search
  • Adv. Search
    HomeLoginUploadHelpAboutAdminister Goto mobile version
    Please use this identifier to cite or link to this item: http://tkuir.lib.tku.edu.tw:8080/dspace/handle/987654321/100110


    Title: Modeling and Manufacturing of a Micromachined Magnetic Sensor Using the CMOS Process without Any Post-Process
    Authors: Tseng, Jian-Zhi;Wu, Chyan-Chyi;Dai, Ching-Liang
    Contributors: 淡江大學機械與機電工程學系
    Keywords: magnetic sensor;magneto-transistor;CMOS
    Date: 2014-04-11
    Issue Date: 2015-01-28 11:07:45 (UTC+8)
    Publisher: Switzerland: M D P I AG
    Abstract: The modeling and fabrication of a magnetic microsensor based on a magneto-transistor were presented. The magnetic sensor is fabricated by the commercial 0.18 μm complementary metal oxide semiconductor (CMOS) process without any post-process. The finite element method (FEM) software Sentaurus TCAD is utilized to analyze the electrical properties and carriers motion path of the magneto-transistor. A readout circuit is used to amplify the voltage difference of the bases into the output voltage. Experiments show that the sensitivity of the magnetic sensor is 354 mV/T at the supply current of 4 mA.
    Relation: Sensors 14(4), pp.6722-6733
    DOI: 10.3390/s140406722
    Appears in Collections:[機械與機電工程學系暨研究所] 期刊論文

    Files in This Item:

    File SizeFormat
    index.html0KbHTML100View/Open

    All items in 機構典藏 are protected by copyright, with all rights reserved.


    DSpace Software Copyright © 2002-2004  MIT &  Hewlett-Packard  /   Enhanced by   NTU Library & TKU Library IR teams. Copyright ©   - Feedback